Kratos Axis Ultra DLD

The Kratos Axis Ultra DLD is an X-ray photoelectron spectroscopy (XPS) system equipped with a dual (Al/Mg) and a monochromated Al X-ray source, and a parallel imaging electron analyzer.

The instrument is capable of large area (700 x 300 μm) and small spot (15 μm) spectroscopy, and it has a spatial resolution (imaging mode) of < 3 μm.

A small spot 5 keV Ar-ion sputter gun allows for depth profiling of samples. A charge neutralizer enables measurement of non-conductive samples (e.g. oxides).

Furthermore, it has a FE electron source for Auger spectroscopy and SEM applications.

The typical base pressure in the analysis chamber is < 8 x 10-10 Torr.

Current location: Bevill 1058